High resolution SE detector

In-lens detection system (UHD) for SE

STEM detector

Scintillator BSE detector

Low vacuum BSE and SE detectors

EDX system: 100mm² JEOL EDS detector

Low-temperature system: Coolstage ULTRA -50°C to +50°C

Low-vacuum  (1 - 300 Pa)

Plasma cleaner at the load lock.

Photography and documentation:  digitalized (TIFF- , JPG-formatted)

Advantages of low-temperature and low-vacuum scanning electron microscopy

New SEM with beam deceleration option allows imaging with voltages down to 100V. Low-temperature and low-vacuum scanning electron microscopy are fast and almost-free-of-artefacts preparation techniques well suited for samples which cannot easily be prepared and documented by conventional preparation methods (e.g. wet or oily samples, waxes, labile samples, instabile sediments). The BSE detector allows the visualization of contrast of different materials within a sample. The contrast of material results from elements with different densities and is finally shown in form of different grey scale values. Elements of higher atomic number appear brighter, those of lower atomic number more dark.