Growth and Characterization of 2D Materials


Prof. Dr. Sascha Schäfer

saschahav.segchaehpuqfer(at)unf/ysni-oldenburh74uhg.dedqm (sascha.schaefnfer@q6xuo/hp/
room W01A 1-105
telephone +49-441-798-3536

Dr. Levent Gütay

levent.guevktay(at)uni-oldenbd/jaurnhhlg.dehxab5 (levent.b9guetaypag@udfni-oldenburg.deewz/e)
room W1A 2-203
telephone +49 441 798-3927

Dr. Devendra Pareek

devegfucndrajxm7i.partxeek0v1uu(at) (
room W1A 2-201
telephone +49 441 798-3924





Molybdenum disulfide MoS2 is a layered compound semiconductor material which belongs to the family of transition metal dichalcogenides (TMDC). The optoelectronic properties of these materials are strongly influenced by the thickness of the film. Particularly the band gap changes from an indirect to a direct transition by reducing the film thickness to a monolayer. In our recently started research activities, we investigate various growth procedures, including chemical vapor deposition (CVD) [1], atomic layer deposition (ALD) [2] and solution-based approaches [3]. We investigate the reaction pathway and growth mechanisms during the layer formation, and characterize the structural and opto-electronic properties. Furthermore, using deterministic stamping and film transfer techniques, we prepare free-standing TMDC sample stacks suitable for transmission electron microscopy.

Our in-house developed CVD type approach is based on a vapor-phase assisted sulphurization process (VASP) which allows for reproducible synthesis of large-scale monolayer MoS2 on SiO2/Si and sapphire. Current research activities focus on our recently developed ALD process which is performed inside a rapid thermal processing reactor. This process exhibits a high tolerance towards the growth parameters and allows for rapid processing of monolayer MoS2 with different properties, such as domain size, photoluminescence yield etc.

In a novel approach, we are exploring the formation of various patterns and shapes of MoS2 by self-assembly of molecules via a wet-chemical synthesis. We are so far able to produce highly luminescent samples which contain alternating patterns of thin (monolayer type) and thick (bulk type) domains. Further investigations on growth of defined patterns via spray pyrolysis and chemical inkjet printing are underway.

Recent publication:

[1] D. Pareek, M. A. Gonzalez, J. Zohrabian, M.H. Sayed, V. Steenhoff, C. Lattyak, M. Vehse, C. Agert, J. Parisi, S. Schäfer, L. Gütay, A vapor-phase-assisted growth route for large-scale uniform deposition of MoS2 monolayer films, RSC advances 9, 107-113 (2019)


[2] M.A. Gonzalez, L. Büsing, D. Pareek, J. Parisi, S. Schäfer, L. Gütay, Synthesis of Large-Area MoS2 monolayer films by a Parameter-Resilient ALD Approach (Manuscript in preparation)


[3] K. Roach, M.A. Gonzalez, L. Büsing, L. Gütay, S. Schäfer, D. Pareek, Self-assembled 2D-MoS2 ripple patterns synthesized via wet chemical approach (manuscript in preparation)

UNDgyhb-Webmap+ister (sascha.uxuhschn3alaefer@uwjol.drwu2e) (Changed: 2020-04-30)