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Evaporation Chamber
Instrumentation
Mini coater (Tectra) with quartz crystal microbalance
Method
The instrument is used for the preparation of thin-film electrodes of Au. First, a chromium adhesion layer (ca. 5 nm thick) is evporated using an electron beam evaporator. Secondly, a gold layer of 50-200 nm thickness is evaporated from a resistively heated crucible. The layer thickness is monitored by the quartz crystal microbalance.