Lecture: Microrobotics and Microsystem Technology

Lecture: Microrobotics and Microsystem Technology

Microrobotics and Microsystem Technology

3 LE, 1 TU, 6 CP

Prof. Dr.-Ing. S. Fatikow

Ideas and problems of microrobotics and MST; applications; techniques of MST; silicon-based micromechanics; LIGA technology; microactuators: principles and examples (electrostatic, piezoelectric, magnetostrictive, electromagnetic, SMA-based, thermomechanical, electrorheological and other actuators); microsensors: principles and examples (force and pressure, position and speed, acceleration, biological and chemical, temperatur and other sensors); MST and information processing; microsystem design and simulation; classification of microrobots; coarse positioning of a microrobot; fine positioning of a microrobot; handling of microparts: problems and solutions; micro grasp techniques; microassembly; process automation by microrobots; desktop robot cell in SEM

Within recent years, microrobotics and microsystem technology (MST) have become a focus of interest to industry and evolved to an important field with a great application potential. It plays a decisive role for industry to be competitive in many areas such as medicine, production engineering, biotechnology, environmental technology, automotive products, etc. Despite of the growing interest in this new technology, there is hardly any book or lecture course that treats microrobotics and MST in a coherent and comprehensive way. This course is an attempt by Division Microrobotics and Control Engineering (AMiR) to give the student a systematic introduction to microrobotics and MST. It discusses all important aspects of this rapidly expanding technology, its diversity of products and fields of application. The course contains an overview of numerous ideas of new devices and the problems of manufacturing them.


  • Lecture notes (can be obtained for € 10,- in our secretariate)


  • Fatikow, S.: Mikroroboter und Mikromontage, Teubner, Stuttgart Leipzig, 2000
  • Fatikow, S./Rembold, U.: Microsystem Technology and Microrobotics, Springer, Berlin Heidelberg New York, 1997

Secondary Literature (only available for some subareas!):

  • Brück, A. und Schmidt, A.: Angewandte Mikrotechnik, Hanser, München Wien, 2001
  • Ehrfeld, W. (Hrsg.): Handbuch Mikrotechnik, Hanser, München Wien, 2000
  • Elbel, Th.: Mikrosensorik, Vieweg, Wiesbaden, 1996
  • Fukuda, T. and Menz, W. (Eds.): Micro Mechanical Systems, Elsevier, Amsterdam, 1998
  • Gardner, J.W.: Microsensors, Wiley, Chichester, 1994
  • Gerlach, G. und Dötzel, W.: Grundlagen der Mikrosystemtechnik, Hanser, München Wien, 1997
  • Krause, W.: Fertigung in der Feinwerk- und Mikrotechnik, Hanser, 1995
  • Menz, W. und Mohr, J.: Mikrosystemtechnik für Ingenieure, VCH, Weinheim, 1997
  • Mescheder, U.: Mikrosystemtechnik, Teubner, Stuttgart Leipzig, 2000
  • Tränkler, H.-R. und Obermeier, E. (Hrsg.): Sensortechnik, Springer, Berlin Heidelberg, 1998
  • Völklein, F. und Zetterer, Th.: Einführung in die Mikrosystemtechnik, Vieweg, Wiesbaden, 2000

Pre-requisites: -

Co-requisites: Module "Microrobotics 2"

Assessment: oral examination and course attendance
Methods of Assessment for Ratings 0-100: course attendance: 20%, oral examination: 80%

Specialisation: Embedded Systems and Microrobotics

Computer Science Area Choice: Systems Engineering

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